Product Catalog

VARIAN VT-114 14″ UHV

system includes: 14″ ID ss vacuum cylinder w/nine 2 ¾” Conflat ports, poppet isolation valve & 12″ tall ss bell jar
w/14″. Wheeler flange. Pumping equipment includes 6 triode ion pumps with a total pumping speed of 240 l/s, multi-filament titanium sublimation source, cryo panel & dual Vacsorb roughing system w/manifold. Electronics include Varian 921-0066 ion pump power supply, Varian 922-0043 TSP power supply, Varian 845 digital ionization gauge controller & bake-out power supply w/timer, without bakeout shroud. s/n M005-490 Chamber weight 325#

VARIAN FC12 – 12″ UHV system includes

12″ dia stainless vacuum cylinder w/5 integral triode ion pumps w/a total pumping speed of 200 l/s. The 12″ dia x 12″ tall ss bell jar has two 6″ OD Conflat & three 2-3/4″ OD Conflat ports. This system also includes a manually operated poppet style isolation valve, Varian 921-0066 ion pump power supply, Varian TSP w/cryo-array w/controls & two stage Vacsorb roughing manifold

VARIAN 12″ UHV system includes

12″ diameter stainless vacuum cylinder w/5 integral ion pumps w/a total pumping speed of 200 l/s. Varian 921-0066 ion pump power supply

PERKIN ELMER MODEL CF

roughing system includes: a dry mechanical pump & three toggle valve actuated rectangular sorption pumps w/ LN2 Dewar which attain a contaminant free roughing pressure below 1 x 10-4 torr w/pumping speed comparable to a 50 CFM mechanical roughing pump. Sorption pumps have built in bakeout heaters w/timer

Perkin-Elmer 283-8550

XYZ manipulator  X & Y axis, +/- .5″ travel, 1″ Z axis. 2-3/4″ CF

VARIAN MEGASORB MODEL 931-5010 Roughing Module

Includes two stage sorption pump, manifold, manually operated valves, bakeout & molecular sieve (Manual)

VARIAN MEGASORB II MODEL 931-5009

Roughing Module with two stage sorption pump, venturi, manifold, gauging, bakeout control, pneumatic valves & molecular sieve (automatic)