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USED
RF, SPUTTERING & GLOW DISCHARGE POWER SUPPLIES
E. McGrath Inc, 35 Osborne St, Salem MA 01970
Note: We are not affiliated with the companies listed below. Please
contact them directly for any inquiries for new equipment.
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VRF020
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Advanced Energy
DC dummy load, 2266-000-A, 25 ohm, air cooled, est. 5 KW
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$950
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VRF035
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Advanced Energy LF5, 50-460 khz supply, 500 watts. 208/50/60/1, water cooled
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$4,250
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VRF040
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Advanced Energy
RFDS 2000-2V, 13.56 mhz supply, 2 kw, OEM design w/o front controls, Model #
3155028-013B 208/50/60/3 water cooled. |
$3,250
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VRF045
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Advanced Energy
PDW2200 pulsed generator, 400 khz, 2200 watts, water cooled. Type N connector.
Digital meters, I/O in rear operates generator. 208-230/60/50/3. 41# shipping
weight. |
$4,750
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VRF060
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Advanced Energy MDX10K magnetron drive 10 kw DC sputter power supply,
208/60/50/3 No serial port.
PIX2 |
$7,250
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VRF065
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Advanced Energy
MDX10K slave magnetron drive 208/60/50/3 With serial port. Two in stock, 68# wgt
PIX2 |
$4,250
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VRF080
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Advanced Energy (Commonwealth Scientific) ID3500 ion source drive, 220/1 40# net
weight |
$7,850
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Airco Temescal
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VRF100
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Airco
SP-5 5 kw DC sputtering supply 400 to 800V DC 0-7 amps w/o controls 208V, 3 ph
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$1,850
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VRF120
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Airco CL2 glow discharge power supply 5 kV at 400 ma, 240/1 130# net |
$2,250
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VRF140
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Airco
SP15 15 kw DC sputtering supply 400 to 800V DC, 0-25 amps, w/o controls
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$2,250
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Bird
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VRF250
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Bird
8431, 50 Ohm dummy loads, 500 watts.
NEW
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$450
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Comdel
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VRF300
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Comdel
CPS 1000 amplifier 40.68 MHz, w.c., solid state, 1 kw, 208/3
NEW
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$3,500
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VRF320
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Comdel
CPS-1000 generator, 1 kw, 13.56 water cooled, 208/60/3
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$2,750
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VRF340
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Comdel
CPS 2000 amplifier 13.56 MHz, w.c. solid state, 2 kw
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$5,250
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VRF404 |
ENI Matchwork 5 MW-5N-21021 impedance matching network, 500 watts, 13.56 MHZ |
sold |
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VRF410
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ENI
OEM-6, 650 watts, 13.56 MHZ, 190-250/60/50/1 50 Ohm type N
connector. Water Cooled, .8 gpm. 82# |
$2,500
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VRF420
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ENI OEM-12A-21041-51, 1250 watts, 13.56 MHZ, 208/240/50/601, solid-state, water-cooled, 50 Ohm
type N. 25 pin interface connector. 125 # net weight |
$2,950
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VRF421 |
ENI OEM-12 1250 watts, 13.56 MHZ, 208/240/50/601, solid-state, water-cooled, 50
Ohm type N. 15 pin interface connector |
$2,950 |
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VRF422 |
ENI OEM-12L 1250 watts, 13.56 MHZ, 208/240/50/601, solid-state, water-cooled, 50
Ohm type N. 15 pin interface connector |
$2,950 |
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VRF430
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ENI OEM-12B-07, 1250 watts, 13.56 MHZ, 208/240/50/60/1, solid-state, water-cooled, 50 Ohm
type N 15 pin interface connector and RS-232. 98 # net weight. |
$4,500
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VRF435 |
ENI OEM-12B3, 1250 watts, 13.56 MHZ, 208/240/50/60/3, solid-state, water-cooled,
50 Ohm type N 15 pin interface connector and RS-232. 92 # net weight |
$4,750 |
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VRF440
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ENI OEM-25 2.5 KW - 13.56 MHZ Solid-state, water-cooled, 208/3 50 Ohm type HN
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$5,250
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VRF441 |
ENI OEM-25A-2109-51 2.5 KW - 13.56 MHZ Solid-state, water-cooled, 208/3 50 Ohm type HN
25 pin interface. 225# net weight |
$6,250 |
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VRF450
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ENI OEM-50-2 (XL), 3 KW - 13.56 MHZ solid-state, water-cooled, 4 gallons per
minute 190-240/60/50/3, 50 Ohm, type N output. 375" net |
$8,500
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VRF451 |
ENI OEM-50-2 (XL), as above, new in box |
$9,750 |
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VRF460
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ENI
OEM50-1, 5 KW, 13.56 MHZ, solid-state, water-cooled, 190-240/60/50/3, 50 ohm, type LC
connector |
$11,500
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VRF485
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ENI
ACG-3 27.12 MHZ, 210 watts, compact, solid-state 115V, 50 ohms, air-cooled |
$2,250
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VRF490
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ENI
EGR-4800B, 8-111 KHZ, 4,000 watts , type N 208/60/3
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$4,750
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Lepel
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VRF500
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Vacuum tube set for Lepel T-7.5-3-KC-BW induction heater, |
$950
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VRF540
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Lepel
RWAG-5 water recirculator, 230/3, cools units to 5 KW
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$1,950
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VRF543
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Lepel
RWWEX-20 water recirculator, water to water.
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$2,250
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VRF560
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Lepel
T-10-3MC1-XOSA 10 kw, 13.56 MHz, generator air-cooled 460/60/3
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$5,500
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VRF565
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Lepel
T-2.5-3-KC1 induction heater, 230/1. hybrid. SCR controlled.
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$3,950
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VRF570 |
Lepel T-5-3-MC-BW high frequency induction heater, 208/230/60/3, SCR controlled,
with RWAG-5 air-cooled heat exchanger |
$6,500 |
Muegge
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VRF580
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MW-PPEMGC-8K5-0300, Microwave power supply, 480/3 8 KW Two available, picture
shows the front of one, and the rear of an other. Each: |
$11,500
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Other
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VRF802 |
Amplifier Research 200L, 200 watt linear amplifier, 1 to 200 Mhz, 53 dB gain.
New Arrival |
$6,250 |
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VRF805
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Anelva PDC-307D DC sputter supply, 30 kw, -600 vod, 50 amps. 200/50/60/3
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$17,500
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VRF807
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Daihen microwave triple stub automatic tuner, SMA-20B 2 kw, 2.45 ghz, with
CMC-10A remote control and interconnect cable. 24vdc input. New Surplus. 109 x
55mm waveguide. PIX2
PIX3 |
$1,950
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VRF809 |
Eratron HFP85012, 13.56Mhz supply, 1200 watts, solid state, water cooled |
$3,100 |
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VRF810
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Eratron PPS-8210 DC 10 KW sputtering supply, w/o remote control. 208/3 several available
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$3,950
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VRF820
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GEC RF generator 350-450 kHz, 500 watts, tube
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$1,250
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VRF830
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Leo Engineering G-7000 glow discharge power supply 7 kV at 350 ma 2@
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$2,950
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VRF835
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Leo/KHF G-7000 glow discharge, Variac controlled. 7kv, 700 ma max, 2.5 kva, 230/60/50/1
124 pounds net weight. 19" rack, 10-1/2" high |
$2,750
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VRF840
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NRC DC 3197 sputtering supply DC1, 5 kV negative, 500 ma max. Originally part
of a system with the DC2 for triode sputtering. The supply is metered,
unregulated, with a 48% ripple. Current limiting required. 208/230/60/1 est.
weight 250# |
$1,750
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VRF850
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L H
Simard PD20 plasma discharge supply, 85 VDC,10 amps. Use in conjunction with a
TS/1, TS/2 or RF supply for target voltage. Tri-Mag 2x6 source available at
VEB450 |
$3,295
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VRF852
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Tegal/Comdel T-1000E generator, 13.56 mhz, w/c 1 KW 2@
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$2,450 |
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VRF852A
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Tegal parts: CD1028-00304 AC module, CD-1043-00205RW main ctrl, CF1040-00205RW rf control & CD-1043-0050/RW main controll. lot price
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$1,250
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VRF853
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Tegal CD1093-00303 motor controls 2@
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$650
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VRF860
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Thermonic/Taylor-Winfield 50 induction heater, 1 kw, 450KC, tube, 120V
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$2,500
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VRF865
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Thermonic/Taylor-Winfield MK-HS, 5 kw induction heater with water cooler.
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$5,950
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VRF870
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Varian 980-2084 7 KW DC S gun power supply w/1 gun control
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$2,750
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VRF872
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Varian source control assembly model 697090-01
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$550
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VRF874
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Varian Multi-Range 12 KW DC sputtering power supply. Gen 2.6. Type VPW2870U6,
s/n UG105F5, Part # TFS# 460/480/50/60/3. 20 amps.63#
PIX2 |
$4,750
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Plasma Therm
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VRF600
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Plasma Therm
HFS2000D, 2kw, 13.56 MHz, tube, air-cooled 208/230/60/50
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$3,250
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VRF610
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Plasma Therm
HFS-1500D, 13.56 MHz, 1.5kw , tube, air-cooled
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$2,750
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VRF620
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Plasma Therm
HESP heat exchanger
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$625
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VRF630
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Plasma Therm
AMNS-3000E matching network, 3 kw
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$3,250
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VRF640
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Plasma Therm
HFS500E 13.56 MHz, 500 watts , tube a.c.
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$1,750
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VRF650 |
Plasma Therm
CEX-2, Common emmiter driver with phase shifter option, allows two generators to
work in parallel |
$1,250 |
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VRF645
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Plasma Therm
CEX-2;standard version $375
Plasma Therm APC-3 automatic power controller $375
Plasma Therm SEV-1D substrate volt meter $225
Plasma Therm SEV-2D volt
meter $375 |
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RF Plasma Products
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VRF710
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HFS5,000D generator, 13.56 MHz, 5 kw 208/230/3, air cooled
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$8,500
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VRF720
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AMN-5000E matching network 13,56 Mhz, 5kw
PIX2 |
$4,500
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VRF740
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HFS3000D 3 kw, 13.56 MHz, tube, air cooled, 208/230/60/50
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$4,250
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978-744-3546
8/25/08
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