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USED RF & SPUTTERING  SUPPLIES

E. McGrath Inc, 35 Osborne St, Salem MA  01970

Note:  We are not affiliated with the companies listed below. Please contact them directly for any inquiries for new equipment.

Advanced Energy

VRF060 Advanced Energy MDX10K magnetron drive 10 kw DC sputter power supply, 208/60/50/3 No serial port.  PIX2 $4,250
VRF065 Advanced Energy MDX10K slave magnetron drive 208/60/50/3 With serial port. Two in stock, 68# wgt  PIX2 $3,750
VRF070 Advanced Energy MDXII 30K magnetron power supply. 480/60/3 input M/N 3152255-223B s/n 275406 F/R B  PIX2 $8,250
VRF080 Advanced Energy (Commonwealth Scientific) ID3500 ion source drive, Model 2002-004-A.  s/n 5738  220/1 40# net weight $4,850
 

Amplifier Research

 
VRF100 Amplifier Research 700A1, 700 watts, 10 kHz to 1 MHz 37# 115 volts PIX2 $1,450
VRF120 Amplifier Research 150A220, 150 watts, 10 kHz to 220 MHz, 240/1 PIX2 $6,500
VRF130 Amplifier Research 200T2G4, 200 watts, 2-4 GHz 240/1 PIX2 $6,500

Bird

VRF250 Bird 8431, 50 Ohm dummy loads, 500 watts.  NEW     $450

Comdel

VRF300 Comdel CPS 1000 amplifier 40.68 MHz, w.c., solid state, 1 kw, 208/3 $2,750
VRF305 Comdel CPS-500A rf supply, 13.56, 500 watts, air cooled. 208/1 48# PIX2 $1,950
VRF310 Comdel MatchPro CPM-1000 control PIX2 PIX3 $475
VRF320 Comdel CPS-1000 generator, 1 kw, 13.56 water cooled, 208/60/3 82# $2,750
VRF330 Comdel CX-600S generator, 600 watts, 27.12 Mhz, 208/1  air cooled PIX2 PIX3 50# $2,950
VRF340 Comdel CPS 2000 RF supply 13.56 MHz, water cooled solid state, 2 kw Type N connector, 208/3  PIX2 $5,250

ENI division of MKS

VRF400 ENI A-500 linear amplifier, .3 to 35 MHz, 500 watts, 60 dB gain,  Type N connector, 165#. 18 x 24 x 28" high.  230/50/60/1.  PIX2 PIX3 $9,250
VRF401 ENI 3200L-1739 RF Power Amplifier, 250 kHz to 150 MHz, 200 W, 55 dB `115/230 volts $5,750
VRF402 ENI 440LA RF Power Amplifier, 150 kHz to 300 MHz, 40 W, 45 dB 56# PIX2 $2,750
VRF403 ENI 1140LA RF Power Amplifier, 9 kHz to 250 kHz, 1100 W, 55 dB 48# PIX2 $5,250
VRF406 ENI PlasmaLoc 2-HF; PL-2HF-11451 100-450 KHz, 1,400 watts, 50 to 600 ohm impedance, Type C connector 87# s/n 2509 120/50/60/1 PIX2 PIX3 PIX4 More_Info $3,100
VRF410 ENI OEM-6, 650 watts, 13.56 MHZ, 190-250/60/50/1  50 Ohm type N connector. Water Cooled, .8 gpm.  82# several in stock PIX2  More_Info $1,950
VRF421 ENI OEM-12 1250 watts, 13.56 MHZ, 208/240/50/601, solid-state, water-cooled, 50 Ohm type N. 15 pin interface connector   More_Info $2,950
VRF422 ENI OEM-12L 1250 watts, 13.56 MHZ, 208/240/50/601, solid-state, water-cooled, 50 Ohm type N. 15 pin interface connector 2 in stock PIX2  More_Info $2,950
VRF423 ENI OEM-12A-6. 13.56 MHZ, 208/240/50/601, solid-state, water-cooled, 50 Ohm type N. 25 pin interface connector Only 250 watts output, As-is PIX2 $1,125
VRF440 ENI OEM-25 2.5 KW - 13.56 MHZ Solid-state, water-cooled, 208/3 50 Ohm type HN 15 pin interface More_Info $5,250
VRF485 ENI ACG-3 27.12 MHZ, 210 watts, compact, solid-state 115V, 50 ohms, air-cooled More_Info $2,250
VRF486 ENI ACG-3, 13.56 Mhz, 300 watts, air cooled. More_Info $2,450
VRF487 ENI EGB-1400, 9-250 Khz, 1,400 watts. runs, but 3 of 8 fuses blown in RF section.  As-Is $750
VRF490 ENI EGR-4800B, 8-111 KHZ, 4,000 watts , type N 208/60/3 PIX2 More_Info $4,750
     

Other
VRF805 Canon Anelva PDC-307D DC sputter supply, 30 kw, -600 VDC, 50 amps. 200/50/60/3, 125 amps. s/n H90Z015. Schematic H13-16791 286# 23 x 31 x 20" High.  CONV5 lamp lit, needs repair PIX2 PIX3 PIX4 $9,500
VRF807 Daihen microwave triple stub automatic tuner, SMA-20B 2 kw, 2.45 ghz, with CMC-10A remote control and interconnect cable. 24vdc input. New Surplus. 109 x 55mm waveguide. PIX2 PIX3 $1,950
VRF836 Manitou Systems PS-3, 13.56 Mhz, 300 watts with built in auto match. HN output connector.  115 volts. $3,250
VRF851 Tegal CR1144 matching networks, 13.56 mhz PIX2 PIX3 PIX4 2@ $1,750
VRF852 Tegal/Comdel T-1000E generator, 13.56 mhz, w/c 1 KW 2@ $2,450
VRF874 Varian Multi-Range 12 KW DC sputtering power supply. Gen 2.6. Type VPW2870U6, s/n UG105F5, Part # TFS#  460/480/50/60/3. 20 amps.63# PIX2 $4,750

Plasma Therm & RFPP

VRF645 Plasma Therm APC-3 automatic power controller $375
Plasma Therm SEV-1D substrate volt meter $225
Plasma Therm SEV-2D volt meter  $375
VRF716 RFPP AM-20 matching network, 2,000 watts, 13.56 Mhz, water cooled with AMPS-2A controller pdf-info  New Arrival $5,250
 VRF745 HFS250D, 250 watts, 13.56 MHz New Arrival $950

978-744-3546

7/20/23