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PLASMA, CHEMICAL ETCHERS, & CVD SYSTEMSE. McGrath Inc,
35 Osborne St, Salem MA 01970
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SC0404 |
March Instruments PX ATM plasma system for 1/4" ID quartz tubing. 115 volts.
PIX2
PIX3
PIX4
PIX5 New Arrival |
$4,750 |
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SC0416 |
Mercator Control System LF-5 photoresist stripper(Same as Technics 500-II) 8-1/2" wide,
7-1/2" deep. 500 watts. Requires 14 cfm Fomblin filled pump, not included. PIX2
New Arrival |
$6,500 |
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SC0428
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International Plasma etcher, dual tube, 3" dia x 13" l w/o RF supply or controller
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$600
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SC0429 |
IPC PM1813 plasma etcher, single 8 x 14" tube, RF supply or controller
PIX2 |
$1,650 |
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SC0436
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NEW quartz chamber for LFE 8000 plasma nitride etcher |
$725 |
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SC0437 |
Used quartz reaction chamber for LFE 8000 plasma nitride deposition |
$400 |
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SC0446 |
Tegal 221 dry etcher, aluminum chamber, 8" diameter, with 13.56mhz, 300
supply. 115 volts PIX2
PIX3 As-is |
$1,950 |
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SC0452
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PT Analytical 210 end point controller unit, w/o monochrometer/detector 2@
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$500
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SC0453
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Xinix 1011B end point detector, controller only
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$1,750
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SC0454
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Xinix 1014 enpoint controller and 1104 monochrometer
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$3,450
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SC0458
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EG&G/PAR optical multi-channel analyzer, 1451 plasma monitor w/1452, 512 element 2.5 mm aperture SIPD detector, HP 1340A display
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$2,500
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SC0460 |
Semitool SDC-400 photo mask etch spinner, 150 mm w/acid pumps & controls
PIX2 |
$5,750
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SC0470 |
Tempress 425C rotor carriers, adjustable from 2 to 5". set of 4 |
$825 |
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SC0471 |
Spin rinser turntable, 19" diameter, holds 4 125 mm wafer carriers, stainless.
3/4 " shaft mount, with spray heads. J78106 |
$750 |
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SC0472 |
Spin rinser turntable, 19" diameter, holds 6 125 mm wafer carriers, coated,
3/4 " shaft mount, with spray heads 901372 |
$950 |
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SC0489
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Semitool STI 260C rinser dryer, now with 3" rotor, w/o controller
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$1,300
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SC0490
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IPC/Branson series 4000; PM1813 reactor center only, 8" diameter x 14" deep.
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$1,250
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